PKL

IC Photomask

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PKL
[Korea]

Address
#493-3, Sungsung-dong Cheonan-si Chungcheongnam-do
Phone
82-41-5290367
Contact name
Soo-hong, Jeong

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Product Details

Description

Feature

Low Grade

4X/5X Reticle

Glass Size& Type
Address Size
CD Tolerance
CD Uniformity
Defect
Criteria
Registration
5 X 5 X .090 Quartz
0.025~
±0.08
0.08
0.4
±0.08
6 X 6 X .120 Quartz
0.025~0.25
±0.03
0.05
0.5
±0.08
6 X 6 X .250 Quartz
0.02~0.25
±0.02
0.04
0.2
±0.035
4X Reticle
Glass Size& Type
Address Size
CD Tolerance
CD Uniformity
Defect Criteria
Registration
6 X 6 X .250 Quartz
0.02~
±0.03
0.035
0.2
±0.1
1X Ultratech
Glass Size& Type
Address Size
CD Tolerance
CD Uniformity
Defect Criteria
Registration
6 X 6 Quartz
0.02~
±0.03
0.04
0.2
±0.04
1X Mask
Glass Size& Type
Address Size
CD Tolerance
CD Uniformity
Defect Criteria
Regstration
5 X 5 X .090 Quartz
0.025~
±0.1
0.1
0.7
±0.08
6 X 6 X .090 Quartz
0.025~
±0.1
0.1
0.7
±0.08
7 X 7 X .150 Quartz
0.025~
±0.15
0.2
1.0
±0.1

High Grade

4X Reticle (BIM/PSM Masks)

Node

Address Size
CD Tolerance
CD Uniformity
Defect Criteria
Regstration

0.13㎛

0.00125

±0.02

0.025

0.15

±0.03

0.12㎛

0.00125

±0.015

0.02

0.12

±0.03

0.09/0.11㎛

0.00125

±0.015

0.015

0.1

±0.025


Product Image

  • IC Photomask image

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